Track: Technology & Integration Track

Session: Czochralski single crystal silicon growth of shielder shape and magnetic field control for oxygen concentration.

Presentation Number:

Czochralski Single Crystal Silicon Growth of Shielder Shape and Magnetic Field Control for Oxygen Concentration

Minje Cho

Yeungnam University, School of Chemical Engineering, Gyengsan, Not Applicable, Republic of Korea


clock5:00 PM - 6:00 PM

clockRoom : LVCC - Level 2